Resolution Limits Of PMMA Resist for Exposure with 50 kV Electrons
- Alec N. Broers
- 2019
- JES
Publications
14446 results for Physical Sciences
RIE Contamination of Etched Silicon Surfaces
- L.M. Ephrath
- R.S. Bennett
- 2019
- JES
Titanium Dioxide Films to Improve Photoresist Adhesion
- John C. Marinace
- Ralph C. McGibbon
- 2019
- JES
Reversal of Relative Oxidation Rates of <111> and <100> Oriented Silicon Substrates at Low Oxygen Partial Pressures
- S.I. Raider
- L.E. Forget
- et al.
- 2019
- JES
A Viscous Flow Model to Explain the Appearance of High Density Thermal Si02 at Low Oxidation Temperatures
- E. Tierney
- J. Angilello
- 2019
- JES
Effects of Several Parameters on the Corrosion Rates of Al Conductors in Integrated Circuits
- Israel Lerner
- Jerome M. Eldridge
- 2019
- JES
An electron microscope investigation of the effect of phosphorous doping on the plasma etching of polycrystalline silicon
- E.A. Irene
- E. Tierney
- et al.
- 2019
- JES
Radiochemical Analysis of β-Al2O3, and the Preparation of Na-22 Tagged Monocrystals
- L.M. Foster
- J.E. Scardefield
- 2019
- JES
The Etching of Crystallographically Determined Orifices in Sapphire
- A. Reisman
- M. Berkenblit
- et al.
- 2019
- JES
Ellipsometry Measurements of Polycrystalline Silicon Films
- E.A. Irene
- D.W. Dong
- 2019
- JES