Dry Etching for VLSI—A Review
- L.M. Ephrath
- 2019
- JES
Paper
Publications
14465 results for Physical Sciences
The Dissolution Kinetics of GaAs in Undersaturated Isothermal Solutions in the Ga-Al-As System
- M.B. Small
- R. Ghez
- et al.
- 2019
- JES
PaperElectron Beam-Induced Reactions of Orthonaphthoquinone-Diazide-Sulfonyl Derivatives in Phenolic-Type Resins
- Hiroyuki Hiraoka
- Adolfo R. Gutierrez
- 2019
- JES
PaperLuminescence of Silica Glasses Containing Copper
- J.M. Brownlow
- I.F. Chang
- 2019
- JES
PaperEffect of Plating Parameters on Electrodeposited Nife
- Jean Horkans
- 2019
- JES
PaperRIE Contamination of Etched Silicon Surfaces
- L.M. Ephrath
- R.S. Bennett
- 2019
- JES
PaperParameter and Reactor Dependence of Selective Oxide RIE in CF4 + H2
- L.M. Ephroth
- E.J. Petrillo
- 2019
- JES
PaperEffect of Lubricant Environments on Saw Damage in Si Wafers
- T.S. Kuan
- K.K. Shih
- et al.
- 2019
- JES
PaperAnomalous Etch Structures Using Ethylenediamine-Pyrocatechol-Water Based Etchants and Their Elimination
- A. Reisman
- M. Berkenblit
- et al.
- 2019
- JES
PaperProperties of AI2O3 Films Deposited from the AICI3, CO2, and H2 System
- V.J. Silvestri
- C.M. Osburn
- et al.
- 2019
- JES
Paper