Scanning-tunneling-microscope study of antiphase domain boundaries, dislocations, and local mass transport on Au(110) surfaces
- J.K. Gimzewski
- R. Berndt
- et al.
- 1992
- Physical Review B
Paper
Publications
14462 results for Physical Sciences
Quantitation of airborne chemical contamination of chemically amplified resists using radiochemical analysis
- W.D. Hinsberg
- Scott A. MacDonald
- et al.
- 1992
- Microlithography 1992
Conference paperCritical alignments in plane mirror interferometry
- N. Bobroff
- 1992
- Microlithography 1992
Conference paperAcid generation and acid diffusion in photoresist films
- D.R. McKean
- R.D. Allen
- et al.
- 1992
- Microlithography 1992
Conference paperDirect phase measurements in phase-shift masks
- A.P. Ghosh
- D.B. Dove
- 1992
- Microlithography 1992
Conference paperApplication of atomic-force microscopy to phase-shift masks
- A.P. Ghosh
- D.B. Dove
- et al.
- 1992
- Microlithography 1992
Conference paperEffects of polymer end groups on chemical amplification
- Hiroshi Ito
- William P. England
- et al.
- 1992
- Microlithography 1992
Conference paperOverlay measurements using the scanning electron microscope: accuracy and precision
- Michael G. Rosenfield
- 1992
- Microlithography 1992
Conference paperHigh-speed aqueous-developing negative resist based on triflic-acid-catalyzed epoxy polymerization
- R.D. Allen
- Willard E. Conley
- et al.
- 1992
- Microlithography 1992
Conference paperQuantitative oxygen measurements in OMVPE Al x Ga1-x As grown by methyl precursors
- T.F. Kuech
- R.M. Potemski
- et al.
- 1992
- Journal of Electronic Materials
Paper