Publications

14465 results for Physical Sciences

Silicon Oxidation Studies: The Oxidation of Heavily B- and P-Doped Single Crystal Silicon
- - E.A. Irene
  - D.W. Dong
- 2019
- JES
Paper
Electrical Properties of Al/Ti Contact Metallurgy for VLSI Application
- - C.-Y. Ting
  - B.L. Crowder
- 2019
- JES
Paper
Solar Cells on Large-Grain GaAs Thin Films
- - S.M. Vernon
  - A.E. Blakeslee
  - et al.
- 2019
- JES
Paper
Anodic Etching of Defects in P-Type Silicon
- - H. Föll
- 2019
- JES
Paper
On Fitting Error Functions to Data
- - R. Ghez
  - M.B. Small
- 2019
- JES
Paper
An Electrochemically Sealed Al₂O₃ Passivation Layer for Aluminum Alloys
- - M.H. Lee
  - A. Homola
- 2019
- JES
Paper
Developer Temperature Effects on E-Beam and Optically Exposed Positive Photoresist
- - J.M. Shaw
  - M. Hatzakis
- 2019
- JES
Paper
Al Coverage of Surface Steps at SiO2 Insulated Polycrystalline Si Boundaries: Al Evaporation in Vacuum and Low Pressure Ar
- - V.J. Silvestri
  - V.L. Rideout
  - et al.
- 2019
- JES
Paper
Structural Composition of Polymers Relative to Their Plasma Etch Characteristics
- - Lester A. Pederson
- 2019
- JES
Paper
Interactions Between Cr and Pt Films: New Cr-Pt Phases
- - J.E.E. Baglin
  - F.M. d'Heurle
  - et al.
- 2019
- JES
Paper