Particle Deposition and Removal in Wet Cleaning Processes for ULSI Manufacturing
- Mitsushi Itano
- Fredrick W. Kern
- et al.
- 1992
- IEEE Trans Semicond Manuf
Paper
Publications
14462 results for Physical Sciences
Effect of strain in Si/SiGe modulation-doped quantum wells
- K. Ismail
- B.S. Meyerson
- et al.
- 1992
- Surface Science
PaperPositive mode silylation process characterization
- D.C. La Tulipe
- A.T.S. Pomerene
- et al.
- 1992
- Microelectronic Engineering
PaperMagnetic structure in FeRh from constrained total-energy calculations
- V.L. Moruzzi
- P.M. Marcus
- 1992
- Solid State Communications
PaperTamm states in superlattices
- H. Ohno
- E. Mendez
- et al.
- 1992
- Surface Science
PaperStructure and epitaxy of anodic TiO2/Ti(1120)
- David G. Wiesler
- Michael F. Toney
- et al.
- 1992
- Surface Science
PaperDirect observation of the critical state field profile in a YBa2Cu3O7-y single crystal
- T. Tamegai
- L. Krusin-Elbaum
- et al.
- 1992
- Physical Review B
PaperStudies of exchange-induced properties of CdTe{plus 45 degree rule}Cd1-xMnxTe superlattices
- G. Peter
- E. Deleporte
- et al.
- 1992
- Journal of Luminescence
PaperCharacterization of a radio frequency plasma source for molecular beam epitaxial growth of high-7c superconductor films
- Jean-Pierre Locciuet
- Erich Mächler
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperTransient coupled-thermoelastic problem of heat conduction in a multilayered composite plate
- T. Atarashi
- S. Minagawa
- 1992
- International Journal of Engineering Science
Paper