Surface damage threshold of Si and Si02 in electron-cyclotron-resonance plasmas
- Young H. Lee
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Publications
14462 results for Physical Sciences
Temperature optimization in an azimuthally symmetric single-wafer chemical vapor deposition reactor: The low pressure regime
- David E. Kotecki
- Steven G. Barbee
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperMoisture-induced interfacial oxidation of chromium on polyimide
- B.K. Furman
- H.M. Clearfield
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperScanning tunneling microscopy study of the adsorption and recombinative desorption of hydrogen from the Si(100)-2x 1 surface
- John J. Boland
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperStudy particle emission in vacuum from film deposits
- Joseph S. Logan
- James J. McGill
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperDynamical studies of the interaction of D2 with a Cu(111) surface
- C.T. Rettner
- D.J. Auerbach
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperPlasma particulate contamination control. II. Self-cleaning tool design
- Gary S. Selwyn
- Edward F. Patterson
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperC-H bond activation on metals: A quantum dynamics model of direct and precursor mediated dissociation
- A.C. Luntz
- J. Harris
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperAtmospheric pressure chemical vapor deposition of Si and SiGe at low temperatures
- T.O. Sedgwick
- P. Agnello
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperEnhanced sputtering of one species in the processing of multielement thin films
- S. Berg
- C. Nender
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper