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- R. Cao
- F. Bozso
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Publications
14462 results for Physical Sciences
Reactivity of a fluorine passivated silicon surface
- Ruud A. Haring
- Michael Liehr
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperSurface and interface states for GaAs(100) (1x1) and (4x2)-c(8x2) reconstructions
- I.M. Vitomirov
- A. Raisanen
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperDry surface cleaning in integrated vacuum reactive ion etching processes
- Andrie S. Yapsir
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperElectron-sheath interaction in capacitive radio-frequency plasmas
- D. Vender
- R.W. Boswell
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperDopant diffusion in silicides: Effect of diffusion paths
- Carol Stanis
- J.M. Cotte
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperAn isotope approach to characterization of microwave water plasma modified polyimide surfaces
- N.J. Chou
- A.D. Marwick
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperOn distinguishing between two aerosol-size distributions
- Douglas W. Cooper
- 1992
- Aerosol Science and Technology
PaperCopper passivation of boron in silicon and boron reactivation kinetics
- M.O. Aboelfotoh
- B.G. Svensson
- 1991
- Physical Review B
PaperAdmittance measurements of acceptor freezeout and impurity conduction in Be-doped GaAs
- T.W. Hickmott
- 1991
- Physical Review B
Paper