The defect mitigation on EUV stack by track based technology
- Naoki Shibata
- Lior Huli
- et al.
- 2019
- SPIE Advanced Lithography 2019
Conference paper
Publications
9268 results for Computer Science
NeuNetS: An Automated Synthesis Engine for Neural Network Design
- Atin Sood
- Benjamin Elder
- et al.
- 2019
- arXiv
PaperOptimal and general out-of-order sliding-window aggregation
- Kanat Tangwongsan
- Martin Hirzel
- et al.
- 2019
- VLDB
PaperUnderstanding Patterns of Terrorism in India (2007-2017) Using Artificial Intelligence Machine Learning
- Dinesh Verma
- Rithvik Yarlagadda
- et al.
- 2019
- The International Journal of Technology, Knowledge and Society
PaperThe 2nd U.S. semantic technologies symposium (US2TS 2019)
- Anna Lisa Gentile
- Tania Tudorache
- 2019
- Semantic Web
Conference paperTrack based techniques to improve high-resolution EUV patterning defectivity
- Naoki Shibata
- Lior Huli
- et al.
- 2018
- EUVL 2018
Conference paperQiskit Backend Specifications for OpenQASM and OpenPulse Experiments
- David McKay
- Thomas Alexander
- et al.
- 2018
- arXiv
PaperDREAM-Yara: An exact read mapper for very large databases with short update time
- Temesgen Hailemariam Dadi
- Enrico Siragusa
- et al.
- 2018
- Bioinformatics
PaperTowards an architecture for policy-based management of software defined coalitions
- C. Williams
- E. Bertino
- et al.
- 2017
- SmartWorld/SCALCOM/UIC/ATC/CBDCom/IOP/SCI 2017
Conference paperResearch questions to support conversational learning in the era of ubiquitous, mobile agents
- Robert J. Schloss
- Maria Chang
- et al.
- 2018
- IEEE-CVPR 2018
Conference paper