Thermal oxidation of Cu interconnects capped with CoWP
- J.P. Gambino
- S. Smith
- et al.
- 2005
- MRS Spring Meeting 2005
Conference paper
Publications
3553 results for Materials Discovery
Application of nanoindentation to characterize fracture in ILD films used in the BEOL
- Eva E. Simonyi
- E. Liniger
- et al.
- 2005
- MRS Spring Meeting 2005
Conference paperStrain relaxation in Si1-xGex thin films on Si (100) substrates: Modeling and comparisons with experiments
- Kedarnath Kolluri
- Luis A. Zepeda-Ruiz
- et al.
- 2005
- MRS Spring Meeting 2005
Conference paperExplosive shock processing of Pr2Fe14B/α-Fe exchange-coupled nanocomposite bulk magnets
- Z.Q. Jin
- Naresh N. Thadhani
- et al.
- 2005
- Journal of Materials Research
PaperDNA-functionalized MFe 2O 4 (M = Fe, Co, or Mn) nanoparticles and their hybridization to DNA-functionalized surfaces
- David B. Robinson
- Henrik H.J. Persson
- et al.
- 2005
- Langmuir
PaperMaskless lithography
- Rajesh Menon
- Amil Patel
- et al.
- 2005
- Materials Today
PaperCantilever array sensors
- Hans Peter Lang
- Martin Hegner
- et al.
- 2005
- Materials Today
PaperDiffusion of alkanethiols in PDMS and its implications on microcontact printing (μCP)
- Tobias E. Balmer
- Heinz Schmid
- et al.
- 2004
- Langmuir
PaperSoft-lithographically embossed, multilayered distributed-feedback nanocrystal lasers
- Vikram C. Sundar
- Hans-Jürgen Eisler
- et al.
- 2004
- Advanced Materials
PaperPreparation of SrRuO3 films for advanced CMOS metal gates
- K. Fröhlich
- K. Hušeková
- et al.
- 2004
- Materials Science in Semiconductor Processing
Conference paper