Silicon Oxidation Studies: Silicon Orientation Effects on Thermal Oxidation
- E. Tierney
- 2019
- JES
Paper
Publications
14465 results for Physical Sciences
Novel Polymeric Dissolution Inhibitor for the Design of Sensitive, Dry Etch Resistant, Base-Developable Resist
- Hiroshi Ito
- Elizabeth Flores
- et al.
- 2019
- JES
PaperSelective Wet and Dry Etching of Hydrogenated Amorphous Silicon and Related Materials
- I. Haller
- Y.H. Lee
- et al.
- 2019
- JES
PaperMeasurement of Thin-Film Dissolution Kinetics using a Quartz Crystal Microbalance
- W.D. Hinsberg
- C.G. Willson
- et al.
- 2019
- JES
PaperChemical Surface-Modification of a Polyimide: Characterization and a Kinetic Study on the Diffusion of Ions in a Modified Polymer
- Miro M. Plechaty
- Richard R. Thomas
- 2019
- JES
PaperAnalysis of Coincidence Losses for a Monitor of Particle Contamination on Surfaces
- Douglas W. Cooper
- Robert J. Miller
- 2019
- JES
PaperOxygen Exchange on Platinum Electrodes in Zirconia Cells: Location of Electrochemical Reaction Sites
- James N. Michaels
- Neil L. Robertson
- 2019
- JES
PaperEpitaxial Growth and Selectivity of AlxGa1-xAs Using Novel Metalorganic Precursors
- M.S. Goorsky
- T.F. Kuech
- et al.
- 2019
- JES
PaperDependence on the NiP Surface Treatment
- Doreen DiMilia
- Jean Horkans
- et al.
- 2019
- JES
PaperShort Time Annealing of Coevaporated Tungsten Silicide Films
- T.O. Sedgwick
- F.M. d'Heurle
- et al.
- 2019
- JES
Paper