The electron beam proximity printing lithography, a candidate for the 0.35 and 0.25 micron chip generations
- U. Behringer
- W. Haug
- et al.
- 1991
- Microelectronic Engineering
Paper
Publications
14466 results for Physical Sciences
A new approach to the modeling of pnpn structures
- Christian Schmeiser
- Herbert Steinrück
- 1991
- Solid State Electronics
PaperMagnetoresistance enhancement in Gd- Y bilayers
- P. Freitas
- M. From
- et al.
- 1991
- Journal of Magnetism and Magnetic Materials
PaperSurface Processing with Partially Ionized Plasmas
- J.W. Coburn
- 1991
- IEEE Transactions on Plasma Science
PaperSurface etching and roughening in integrated processing of thermal oxides
- M. Offenberg
- M. liehr
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperIs the momentum of a tunneling electron real or imaginary? An alternative description of the tunneling process
- Pierre Guéret
- 1991
- Solid State Communications
PaperMOVPE on patterned substrates: a new fabrication method for nanometer structure devices
- Yvan D. Galeuchet
- Hugo Rothuizen
- et al.
- 1991
- Microelectronic Engineering
PaperThermal, mechanical and chemical effects in the degradation of the plasma-deposited α-SiC:H passivation layer in a multilayer thin-film device
- L.S. Chang
- P. Gendler
- et al.
- 1991
- Journal of Materials Science
PaperFull-Wafer Technology—a New Approach To Large-Scale Laser Fabrication and Integration
- Peter Vettiger
- Gian-Luca Bona
- et al.
- 1991
- IEEE JQE
PaperPlatinum erosion during the growth of sillénite-type crystals
- T. Takamori
- J.J. Boland
- 1991
- Journal of Materials Science Letters
Paper