Laser cleaning of wafer surfaces and lithography masks
- W. Zapka
- A.C. Tam
- et al.
- 1991
- Microelectronic Engineering
Paper
Publications
14466 results for Physical Sciences
Metal-induced states on the GaAs(110) surface probed by angle-resolved photoemission spectroscopy
- D. Heskett
- D. Tang
- et al.
- 1991
- Applied Surface Science
PaperStudies of adhesion of metal films to polyimide
- David L. Pappas
- Jerome J. Cuomo
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperOxygen induced adhesion degradation at metai/polyimide interface
- Da-Yuan Shih
- Nancy Klymko
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperGaas surface oxidation and deoxidation using electron cyclotron resonance oxygen and hydrogen plasmas
- D.V. Podlesnik
- M.T. Schmidt
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperMOVPE of AlGaInP/GaInP heterostructures for visible lasers
- P. Roentgen
- W. Heuberger
- et al.
- 1991
- Journal of Crystal Growth
PaperImages of a microelectronic device with the X1-SPEM, a first generation scanning photoemission microscope at the National Synchrotron Light Source
- H. Ade
- J. Kirz
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperAngle resolved photoemission of NiO(001)
- Z.-X. Shen
- R.S. List
- et al.
- 1991
- Solid State Communications
PaperTwo-dimensional imaging of photofragments and species desorbed from surfaces: Energy and angle resolved studies
- T.J. Chuang
- R. Schwarzwald
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperMagnetization of (100) Cr/Fe/Cr and Pd/Fe/Pd structures
- Chin-An Chang
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper