Study of near‐surface disorder and surface residues after reactive Ion etching of Silicon
- G.S. Oehrlein
- G.J. Coyle
- et al.
- 2004
- Surface and Interface Analysis
Paper
Publications
24864 results for Exploratory Science
Investigation of gallium arsenide multilayer structures using a tunnelling microscope combined with a UHV‐SEM
- O. Albrektsen
- H. Salemink
- 2004
- Surface and Interface Analysis
PaperAdhesion of copper and chromium films to polyimide studied by static SIMS of the interface
- W.J. van Ooij
- R.H.G. Brinkhuis
- et al.
- 2004
- Surface and Interface Analysis
PaperChromium chromate as an inert marker in copper oxidation
- Robert J. Day
- Margaret A. Frisch
- 2004
- Surface and Interface Analysis
PaperA possible solution to the problem of compositional change with ion‐bombarded oxides
- Imre Bertóti
- Roger Kelly
- et al.
- 2004
- Surface and Interface Analysis
PaperSurface modification with lasers
- Paul B. Comita
- 2004
- Advanced Materials
ReviewOn the role of Gibbsian segregation in causing preferential sputtering
- Roger Kelly
- 2004
- Surface and Interface Analysis
ReviewPolysilanes—a new look at some old materials
- Robert D. Miller
- 2004
- Advanced Materials
ReviewBroad bandwidth double-trench waveguides in silicon-on-insulator photonic crystal slabs
- N. Moll
- Y. Vlasov
- et al.
- 2004
- SPIE IOPTO 2004
Conference paperBirefringence control and manipulation in SiliconOxyNitride
- Folkert Horst
- Bert Offrein
- et al.
- 2004
- SPIE IOPTO 2004
Conference paper