Photochemically Generated Gold Catalyst for Selective Electroless Plating of Copper
- Thomas H. Baum
- 2019
- JES
Paper
Publications
14458 results for Physical Sciences
Feature-Size Dependence of Etch Rate in Reactive Ion Etching
- Young H. Lee
- Zhen H. Zhou
- 2019
- JES
PaperReactive ion Etching of Silicon and Silicon Dioxide in CF4 Plasmas Containing H2 or C2F4 Additives
- J.P. Simko
- 2019
- JES
PaperVarious Properties of Sputter-Deposited HfB2 Films
- J.M. Eldridge
- A.R. Forouhi
- et al.
- 2019
- JES
PaperMechanisms of Electroless Metal Plating II. Formaldehyde Oxidation
- Perminder Bindra
- Judith Roldan
- 2019
- JES
PaperReactive Ion Etching of PECVD Amorphous Silicon and Silicon Nitride Thin Films with Fluorocarbon Gases
- Yue Kuo
- 2019
- JES
PaperElectrical Properties of AI/Ti Contact Metallurgy for VLSI Applications
- C.-Y. Ting
- B.L. Crowder
- 2019
- JES
PaperElectrochemistry of Polysilanes with Bound Ferrocene
- Art Diaz
- Mark Seymour
- et al.
- 2019
- JES
PaperPtSi Contact Metallurgy using Sputtered Pt and Different Annealing Processes
- H.-C.W. Huang
- B. Cunningham
- et al.
- 2019
- JES
PaperAmbient Gas Effects on the Reaction of Titanium with Silicon
- Subramanian S. lyer
- Chung-Yu Ting
- et al.
- 2019
- JES
Paper