integrated thermal chemical vapor deposition processing for Si technology
- M. Liehr
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
14462 results for Physical Sciences
Electrometer for repeated charge exchange measurements between a microparticle and a surface: Effect of water adsorption
- L.M. Folan
- S. Arnold
- et al.
- 1990
- Journal of Electrostatics
PaperEpitaxial growth of silicon on Si(001) by scanning tunneling microscopy
- R.J. Hamers
- J.E. Demuth
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThe effect of the interfacial strength on the mechanical properties of aluminum films
- T.W. Wu
- M. Moshref
- et al.
- 1990
- Thin Solid Films
PaperBroadband Microwave Measurements with Transient Radiation from Optoelectronically Pulsed Antennas
- G. Arjavalingam
- Yvon Pastol
- et al.
- 1990
- IEEE T-MTT
PaperProperties of W-N and Mo-N films prepared by reactive sputtering
- K.K. Shih
- D.B. Dove
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSilylation of resist materials using di- and polyfunctional organosilicon compounds
- E. Babich
- J. Paraszczak
- et al.
- 1990
- Microelectronic Engineering
PaperAn optical study of phase transitions of poly (ethylene terephthalate‐co‐p‐hydroxybenzoic acid) liquid crystal
- Tong Sun
- Subrata K. Bhattacharya
- et al.
- 1990
- Journal of Polymer Science, Part B: Polymer Physics
PaperSurface diffractometry and lattice imaging of scanning tunneling microscopy images
- J.E. Demuth
- R.J. Hamers
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperIon energy measurements at the surface of an ion cyclotron range of frequencies antenna faraday shield
- D.J. Hoffman
- R.A. Langley
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper