Ta as a barrier for the Cu/PtSi, Cu/Si, and Al/PtSi structures
- Chin-An Chang
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
14466 results for Physical Sciences
An aerosol model of particle generation during pressure reduction
- J.J. Wu
- Douglas W. Cooper
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperAdhesion studies of metals on fluorocarbon polymer films
- Chin-An Chang
- Yong-Kil Kim
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperCW and time resolved luminescence study of dry etch damage in semiconductor wires
- B.E. Maile
- G. Mayer
- et al.
- 1990
- Microelectronic Engineering
PaperParallel simulated annealing techniques
- Daniel R. Greening
- 1990
- Physica D: Nonlinear Phenomena
PaperReceptor modeling for contaminant particle source apportionment in clean rooms
- Yi Tian
- Pratim Biswas
- et al.
- 1990
- Aerosol Science and Technology
PaperModel calculations for molecular photoabsorption spectra
- W Wurth
- J Stöhr
- 1990
- Vacuum
PaperSuppression of particle generation in a modified clean room corona air ionizer
- Philip C.D. Hobbs
- Vaughn P. Gross
- et al.
- 1990
- Journal of Aerosol Science
PaperReentrant phenomenon in cyanoaryl alkylthioxybenzoates and cyanobenzoyloxyphenyl alkylthiobenzoates
- H.T. Nguyen
- C. Destrade
- et al.
- 1990
- Liquid Crystals
PaperSpatially resolved observation of charge transfer across single grain boundaries in YBaCuO films
- J. Mannhart
- R. Gross
- et al.
- 1990
- Cryogenics
Paper