High resolution electron energy loss spectroscopic characterization of insulators for Si technology
- M. Liehr
- P.A. Thiry
- 1990
- Journal of Electron Spectroscopy and Related Phenomena
Paper
Publications
14467 results for Physical Sciences
Dry etching of TiN/Al(Cu)/Si for very large scale integrated local interconnections
- K.W. Choi
- N.J. Mazzeo
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperCoherent radiation for X-ray imaging—the soft x-ray undulator and the x1a beamline at the NSLS
- H. Rarback
- C. Buckley
- et al.
- 1990
- Journal of X-Ray Science and Technology
PaperProperties of W-N and Mo-N films prepared by reactive sputtering
- K.K. Shih
- D.B. Dove
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperParallel simulated annealing techniques
- Daniel R. Greening
- 1990
- Physica D: Nonlinear Phenomena
PaperRare earth (RE) dependence and Ce-concentration dependence of Tc in Bi-2222 Phase Bi2Sr2(RE1-x Cex)2Cu2O10+y
- T. Arima
- Y. Tokura
- et al.
- 1990
- Physica B: Condensed Matter
PaperMolecular-beam study of gas-surface chemistry in the ion assisted etching of silicon with atomic and molecular hydrogen and chlorine
- J.W. Coburn
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperEmission mechanism in polyimide
- G. Arjavalingam
- G. Hougham
- et al.
- 1990
- Polymer
PaperSilicon bipolar transistor: a viable candidate for high speed applications at liquid nitrogen temperature
- John D. Cressler
- 1990
- Cryogenics
PaperMagnetic instabilities in invar
- V.L. Moruzzi
- 1990
- Physica B: Physics of Condensed Matter
Paper