Lithographic Processing of Polymers Using Plasma-Generated Electron Beams
- Lumin Li
- Jayaram Krishnaswamy
- et al.
- 1990
- IEEE Transactions on Plasma Science
Paper
Publications
14466 results for Physical Sciences
Thermoelastic effects on x-ray lithography masks under pulsed irradiation
- Iqbal Shareef
- Juan R. Maldonado
- et al.
- 1990
- Microelectronic Engineering
PaperElectrometer for repeated charge exchange measurements between a microparticle and a surface: Effect of water adsorption
- L.M. Folan
- S. Arnold
- et al.
- 1990
- Journal of Electrostatics
PaperMicrovoids and defect chemistry at the SiSiO2 interface studied by positron annihilation depth profiling
- G.W Rubloff
- B Nielsen
- et al.
- 1990
- Vacuum
PaperDetermination of proximity effect correction parameters for 0.1 μm electron-beam lithography
- Michael G. Rosenfield
- S.J. Wind
- et al.
- 1990
- Microelectronic Engineering
PaperResistive transition of crystalline Y1Ba2Cu3O7-x in magnetic fields
- T. Worthington
- F. Holtzberg
- et al.
- 1990
- Cryogenics
PaperDelocalization of defects: A new model for the Schottky barrier
- R. Ludeke
- A. Taleb-Ibrahimi
- et al.
- 1990
- Applied Surface Science
PaperRelationship between crystal growth and physical properties in the high temperature superconductor YBa2Cu3O7-δ
- F. Holtzberg
- C. Feild
- 1990
- Journal of Crystal Growth
PaperDefect microchemistry in Si02/Si structures
- G.W. Rubloff
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperHigh-Tc ferroelectrics and superconductors
- K. Alex Müller
- 1990
- Phase Transitions
Paper