Chemical and mechanical properties of UV-cured nanoimprint resists and release layer interactions
- Frances A. Houle
- Ann Fornof
- et al.
- 2008
- SPIE Advanced Lithography 2008
Publications
3599 results for Mathematical Sciences
Fingerprint verification using SIFT features
- Unsang Park
- Sharath Pankanti
- et al.
- 2008
- SPIE Defense + Security 2008
Active collaborative prediction with maximum margin matrix factorization
- Irina Rish
- Gerald Tesauro
- 2008
- ISAIM 2008
Integration of polymer self-assembly for lithographic application
- Joy Y. Cheng
- Daniel P. Sanders
- et al.
- 2008
- SPIE Advanced Lithography 2008
Resist-based polarization monitoring for 193nm high-numerical aperture lithography
- Richard Tu
- Gregory McIntyre
- 2008
- Lithography Asia 2008
Evaluation of 32nm Advanced immersion lithography pellicles
- N. Zhou
- K. Racette
- et al.
- 2008
- SPIE Photomask Technology + EUV Lithography 2008
Improvements in accuracy of dense OPC models
- Chidam Kallingal
- James Oberschmidt
- et al.
- 2008
- SPIE Photomask Technology + EUV Lithography 2008
Optimizing Models Based OPC fragmentation using genetic algorithms
- Domenico A. Dipaola
- Ian Mobert
- 2008
- SPIE Photomask Technology + EUV Lithography 2008
Wavefront generated by reflection of a plane wave from a conic section
- John A. Hoffnagle
- David L. Shealy
- 2008
- SPIE Optical Engineering + Applications 2008
Device-oriented directed self-assembly of lamella microdomains from a block copolymer containing hybrid
- Ho-Cheol Kim
- Joy Cheng
- et al.
- 2008
- SPIE Advanced Lithography 2008