Publications

14466 results for Physical Sciences

Reactive Ion Etching in SF₆ Gas Mixtures
- - R. Pinto
  - R.S. Babu
- 2019
- JES
Paper
Redeposition during Deep Trench Etching
- - Jacob Jorne
- 2019
- JES
Paper
Critical angles for channeling of boron ions implanted into single-crystal silicon
- - Chanahae Park
  - Kevin M. Klein
  - et al.
- 2019
- JES
Paper
Growth of Facet-Free Selective Silicon Epitaxy at Low Temperature and Atmospheric Pressure
- - T.O. Sedgwick
  - P. Agnello
  - et al.
- 2019
- JES
Paper
Corrosion of Thin Film Magnetic Disk: Galvanic Effects of the Carbon Overcoat
- - D. Edmonson
  - Michael A. Russak
  - et al.
- 2019
- JES
Paper
A Self-Aligned, Trilayer, A-Si:H Thin Film Transistor Prepared from Two Photomasks
- - Yue Kuo
- 2019
- JES
Paper
Kinetics of Oxygen Gas Evolution on Hydrous Rhodium Oxide Films
- - Eugene J.M. O'Sullivan
  - Laurence D. Burke
- 2019
- JES
Paper
Chemical Vapor Deposition of Epitaxial Silicon from Silane at Low Temperatures: II. Plasma Enhanced Deposition
- - James H. Comfort
  - Rafael Reif
- 2019
- JES
Paper
Electrodeposition of Nickel-Iron Alloys: 1. Effect of Agitation
- - P.C. Andricacos
  - C. Arana
  - et al.
- 2019
- JES
Paper
Electroplated Magnetic Media with Vertical Anisotropy
- - Jean Horkans
  - I-Chia Hsu Chang
  - et al.
- 2019
- JES
Paper