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- 2004
- Advanced Materials
Paper
Publications
25371 results for Science
Sub-50 nm half-pitch imaging with a low activation energy chemically amplified photoresist
- G.M. Wallraff
- D. Medeiros
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conference paperImaging capabilities of resist in deep ultraviolet liquid immersion interferometric lithography
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- A. Frauenglass
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conference paperImmersion lithography: New opportunities for semiconductor manufacturing
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- Timothy A. Brunner
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- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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- K. Hušeková
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- 2004
- Materials Science in Semiconductor Processing
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- O.R. Wood II
- W.J. Trybula
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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- L.A. Skinner
- S.G. Bankoff
- 2004
- Physics of Fluids
PaperDynamics of vapor bubbles in binary liquids with spherically symmetric initial conditions
- L.A. Skinner
- S.G. Bankoff
- 2004
- Physics of Fluids
PaperRelevance feedback for XML retrieval
- Yosi Mass
- Matan Mandelbrod
- 2004
- INEX 2004
Conference paperComponent ranking and automatic query refinement for XML retrieval
- Yosi Mass
- Matan Mandelbrod
- 2004
- INEX 2004
Conference paper