Selective deposition of AlOx for Fully Aligned Via in nano Cu interconnects
- Son Van Nguyen
- Hosadurga Shobha
- et al.
- 2021
- IITC 2021
Conference paper
Publications
3 results at IITC 2021
Impact of Nanosecond Laser Anneal on PVD Ru Films
- D. Sil
- Yasir Sulehria
- et al.
- 2021
- IITC 2021
Conference paperEM performance improvements for Cu interconnects with Ru-based liner and Co cap in advanced nodes: (Invited)
- Koichi Motoyama
- 2021
- IITC 2021
Conference paper