70 nm damascene-gate MOSFETs with minimal polysilicon gate-depletion
- Hussein I. Hanafi
- Russell Arndt
- et al.
- 2001
- ESSDERC 2001
Conference paper
Publications
4 results at ESSDERC 2001
New polysilicon disposable sidewall process for sub-50 nm CMOS
- K.L. Lee
- D. Boyd
- et al.
- 2001
- ESSDERC 2001
Conference paperBeyond the conventional MOSFET
- H.-S. Philip Wong
- 2001
- ESSDERC 2001
Conference paperCarbon implanted halo for super halo characteristic NFETs in bulk and SOI
- John Ellis-Monaghan
- Kam-Leung Lee
- et al.
- 2001
- ESSDERC 2001
Conference paper