Publications

9 results at ASMC 2025

Sequence-Aware Inline Measurement Attribution for Good-Bad Wafer Diagnosis
- - Kohei Miyaguchi
  - Masao Joko
  - et al.
- 2025
- ASMC 2025
Conference paper
Wafer Defect Root Cause Analysis with Partial Trajectory Regression DM: Big Data Management and Machine Learning
- - Kohei Miyaguchi
  - Masao Joko
  - et al.
- 2025
- ASMC 2025
Conference paper
Impact of Lot Arrival Density Fluctuations on Cycle Time Control IE: Industrial Engineering
- - Masao Joko
  - Kohei Miyaguchi
  - et al.
- 2025
- ASMC 2025
Conference paper
Human WIP Delivery in a Manual Fab
- - Brady Sweeney
  - Fisch Liao
  - et al.
- 2025
- ASMC 2025
Conference paper
Sequence-Aware Inline Measurement Attribution for Good-Bad Wafer Diagnosis DM: Big Data Management and Machine Learning
- - Kohei Miyaguchi
  - Masao Joko
  - et al.
- 2025
- ASMC 2025
Conference paper
Semiconductor SEM Image Defect Classification Using Supervised and Semi-Supervised Learning with Vision Transformers (Topic/category: Defect Inspection and Reduction)
- - Chien-Fu Huang
  - Katherine Sieg
  - et al.
- 2025
- ASMC 2025
Conference paper
A Perspective on Interconnect Scaling Challenges in the NanoStack Transistor Era AP/DFM: Advanced Patterning/Design for Manufacturing (Design-Technology Co-Optimization)
- - Nicholas A. Lanzillo
  - Shahrukh Khan
  - et al.
- 2025
- ASMC 2025
Conference paper
Wafer Defect Root Cause Analysis with Partial Trajectory Regression
- - Kohei Miyaguchi
  - Masao Joko
  - et al.
- 2025
- ASMC 2025
Conference paper
Semiconductor SEM Image Defect Classification Using Supervised and Semi-Supervised Learning with Vision Transformers
- - Chien-Fu Huang
  - Katherine Sieg
  - et al.
- 2025
- ASMC 2025
Poster