Thermal stress control in Cu interconnects
- Chih-Chao Yang
- Baozhen Li
- et al.
- 2014
- IITC/AMC 2014
Conference paper
Publications
4 results at IITC/AMC 2014
Atomic flux divergence based current conversion scheme for signal line electromigration reliability assessment
- Zhong Guan
- Malgorzata Marek-Sadowska
- et al.
- 2014
- IITC/AMC 2014
Conference paperAdvanced metal and dielectric barrier cap films for Cu low k interconnects
- Deepika Priyadarshini
- Son Nguyen
- et al.
- 2014
- IITC/AMC 2014
Conference paperPerformance of ultrathin alternative diffusion barrier metals for next - Generation BEOL technologies, and their effects on reliability
- Takeshi Nogami
- M. Chae
- et al.
- 2014
- IITC/AMC 2014
Conference paper