Atomic layer deposition of sidewall spacers: Process, equipment and integration challenges in state-of-the-art logic technologies
- Michael Belyansky
- Richard Conti
- et al.
- 2014
- ECS Meeting 2014
Conference paper
Publications
4 results at ECS Meeting 2014
Challenges in contact technologies for planar/non-planar Si technologies
- Praneet Adusumilli
- Emre Alptekin
- et al.
- 2014
- ECS Meeting 2014
Conference paperGate stacks for silicon, silicon germanium, and III-V channel MOSFETs
- Martin M. Frank
- Yu Zhu
- et al.
- 2014
- ECS Meeting 2014
Conference paperUltrathin (8-14 nm) conformal SiN for sub-20 nm Copper/Low-k Interconnects
- Son Van Nguyen
- Deepika Priyadarshini
- et al.
- 2014
- ECS Meeting 2014
Conference paper