A novel approach to isolating the edge of the shallow trench isolation in SiGe HBTs for improved device performance
- Renata Camillo-Castillo
- Q. Liu
- et al.
- 2014
- ECSSMEQ 2014
Conference paper
Publications
8 results at ECSSMEQ 2014
Higher-K formation in atomic layer deposited Hf1-xAlxOy
- Kandabara Tapily
- Steven Consiglio
- et al.
- 2014
- ECSSMEQ 2014
Conference paperSiGe HBTs in 90nm BiCMOS technology demonstrating fT/fMAX 285GHz/475GHz through simultaneous reduction of base resistance and extrinsic collector capacitance
- Q. Liu
- Jim Adkisson
- et al.
- 2014
- ECSSMEQ 2014
Conference paperStrained SiGe on insulator FinFETs: A P-FET candidate for 10nm node (Invited)
- Pouya Hashemi
- Karthik Balakrishnan
- et al.
- 2014
- ECSSMEQ 2014
Conference paperALD and PVD tantalum nitride barrier resistivity and their significance in via resistance trends
- O. Van Der Straten
- X. Zhang
- et al.
- 2014
- ECSSMEQ 2014
Conference paperSilicon germanium FinFET device physics, process integration and modeling considerations (invited)
- Darsen Lu
- Pierre Morin
- et al.
- 2014
- ECSSMEQ 2014
Conference paperThe first thin-film electronic package
- Sol Krongelb
- Lubomyr T. Romankiw
- 2014
- ECSSMEQ 2014
Conference paperPlasma post-oxidation for high mobility strained-Ge pFETs with aggressively scaled high-κ dielectrics
- Winston Chern
- Pouya Hashemi
- et al.
- 2014
- ECSSMEQ 2014
Conference paper