The past, present and future of high-k/metal gates
- Kisik Choi
- Takashi Ando
- et al.
- 2013
- ECS Meeting 2013
Conference paper
Publications
3 results at ECS Meeting 2013
Metal Gate/High-κ dielectric gate stack reliability; or how i learned to live with trappy oxides
- Barry P. Linder
- Eduard Cartier
- et al.
- 2013
- ECS Meeting 2013
Conference paperDeposited ALD SiO2 high-k/metal gate interface for high voltage analog and I/O devices on next generation alternative channels and FINFET device structures
- S. Siddiqui
- M.M. Chowdhury
- et al.
- 2013
- ECS Meeting 2013
Conference paper