Evaluation of sSOI wafers for 22nm node and beyond
- F. Allibert
- Kangguo Cheng
- et al.
- 2012
- S3S 2012
Conference paper
Publications
2 results at S3S 2012
Evolution and expansion of SOI in VLSI technologies: Planar to 3D
- Gary Patton
- 2012
- S3S 2012
Conference paper