Utilizing surface modification in plasma-enhanced cyclic etching of tantalum nitride to surpass lithographic limits
- Nathan Marchack
- Keith Hernandez
- et al.
- 2019
- Plasma Processes and Polymers
Paper
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3 results at Plasma Processes and Polymers
Polymer etching by atmospheric-pressure plasma jet and surface micro-discharge sources: Activation energy analysis and etching directionality
- Andrew J. Knoll
- Pingshan Luan
- et al.
- 2018
- Plasma Processes and Polymers
PaperDependence of polymer surface roughening rate on deposited energy density during plasma processing
- Sebastian Engelmann
- Robert L. Bruce
- et al.
- 2009
- Plasma Processes and Polymers
Paper