J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
No abstract available.
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
Hiroshi Ito, Reinhold Schwalm
JES
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films