Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Measurements have been made on the linewidths of several continuously excited gallium arsenide lasers operating at 77 °K by using an optical system similar to that of a Michelson Interferometer with a leg unbalance of 3000 feet. For CW GaAs lasers operating in a single mode, homodyne detection was used to determine the linewidth to within the system's resolution of 150 kc/s. For various CW GaAs laser current levels and mode configurations, the system allowed a means of determining the bandwidth of the intensity noise by autocorrelation. Copyright © 1966 by The Institute of Electrical and Electronics Engineers, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
Frank Stem
C R C Critical Reviews in Solid State Sciences
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011