E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
For measuring nanoscale displacements, air/vacuum tunnelling is the most sensitive method. However, the alignment mechanism is difficult to scale down for integrated devices. Here, we present a tunnelling displacement sensor based on a squeezable molecular bilayer, which was built from two stacked self-assembled monolayers of mercaptohexadecanoic acid. The bilayer provides an inherent vertical alignment between the tunnelling electrodes. Squeezing of the bilayer leads to an exponential change in the tunnel current. Nanometre displacement sensitivity was achieved. © 2006 IOP Publishing Ltd.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
T. Schneider, E. Stoll
Physical Review B
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials