J.H. Stathis, R. Bolam, et al.
INFOS 2005
No abstract available.
J.H. Stathis, R. Bolam, et al.
INFOS 2005
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Ronald Troutman
Synthetic Metals
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007