Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
An anisotropic growth of nanostructures was observed when germanium was electroplated on a patterned silicon substrate from a nonaqueous solution. Instead of an isotropic growth of mushroom cap expected for electroplating through mask, wire-shaped and wall-shaped structures were obtained, respectively, on via and stripe patterns on silicon substrate. The presence of water in the electrolyte and a high current density were found critical to the anisotropic growth. A passivation of outer surface of the deposit is believed to be involved and prohibits the lateral growth of the deposit. © 2007 The Electrochemical Society.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
K.N. Tu
Materials Science and Engineering: A
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters