Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Carrier concentration of a two dimensional electron gas, ns in n-AlGaAs/GaAs heterostructures is measured with varying the spacer layer thickness. Structures are designed to eliminate the effects of the charges at the surface and interface on ns. Thus obtained ns is shown to be in good agreement with calculation in which 65% of the band gap difference between AlGaAs and GaAs is assumed to appear in the conduction band. © 1990.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010