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SPIE Advanced Lithography 2013
This method, which combines semiconductor manufacturing technology with molecular biology, has been used to build DNA and RNA arrays at densities as high as 10 6 sites/cm 2.
M.I. Sanchez, L.K. Sundberg, et al.
SPIE Advanced Lithography 2013
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SPIE Advances in Resist Technology and Processing 1999
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