Contribution of EUV resist counting statistics to stochastic printing failures
- William D. Hinsberg
- Gregory M. Wallraff
- et al.
- 2021
- JM3
Paper
Publications
101 results for Gregory M. Wallraff
Electro-oxidation of some soluble alkyl and aryl substituted polysilane homopolymers
- A. Diaz
- M. Baier
- et al.
- 2019
- JES
PaperAn analysis of EUV resist stochastic printing failures
- Martha I. Sanchez
- Gregory M. Wallraff
- et al.
- 2019
- EUVL 2019
Conference paperFundamental understanding of chemical processes in extreme ultraviolet resist materials
- Oleg Kostko
- Bo Xu
- et al.
- 2018
- Journal of Chemical Physics
PaperIon Pairing Limits Crystal Growth in Metal-Oxygen Batteries
- Naga Phani Aetukuri
- Gavin O. Jones
- et al.
- 2018
- ACS Energy Letters
PaperReactive monolayers in directed additive manufacturing – area selective atomic layer deposition
- Rudy J. Wojtecki
- Anuja DeSilva
- et al.
- 2018
- J. Photopolym. Sci. Tech.
PaperICE: Ionic contrast enhancement for organic solvent negative tone develop
- Linda K. Sundberg
- Gregory M. Wallraff
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paperCombining accurate O2 and Li2O2 assays to separate discharge and charge stability limitations in nonaqueous Li-O 2 Batteries
- Bryan D. McCloskey
- Alexia Valery
- et al.
- 2013
- Journal of Physical Chemistry Letters
PaperMonitoring the evolution of Line Edge Roughness during resist development using an analog of quenched flow kinetics
- M.I. Sanchez
- L.K. Sundberg
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperImplications of CO2 contamination in rechargeable nonaqueous Li-O2 batteries
- Sanketh R. Gowda
- A. Brunet
- et al.
- 2012
- Journal of Physical Chemistry Letters
Paper