William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Paper
Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes
Abstract
No abstract available.
Related
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
J.Z. Sun
Journal of Applied Physics