Ming L. Yu
Physical Review B
Paper
Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes
Abstract
No abstract available.
Related
A. Krol, C.J. Sher, et al.
Surface Science
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
Hiroshi Ito, Reinhold Schwalm
JES