J.K. Gimzewski, T.A. Jung, et al.
Surface Science
Paper
Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes
Abstract
No abstract available.
Related
Conference paper
Compression for data archiving and backup revisited
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology