John G. Long, Peter C. Searson, et al.
JES
We report the results of measurement and analysis of the electrical conductivity as a function of temperature and anneal for amorphous silicon films. The resistivity of the films between 77 and 300°K increasesc with annealing. Refractory electrodes were used. The extrapolated portions of T- 1 4 fits to the log of the conductivity give physically unreasonable parameters for the T- 1 4 formula. © 1972.
John G. Long, Peter C. Searson, et al.
JES
J.C. Marinace
JES
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
P.C. Pattnaik, D.M. Newns
Physical Review B