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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Gold/fluorocarbon adhesion
Abstract
The adhesion of laminated glass fiber reinforced Teflon® PFA to gold was studied. The results of adhesion testing performed by 90° peeling showed a strong dependency of gold/PFA adhesion on the lamination temperature. The possibility of chemical reaction at the gold/PFA interface is discussed. © 1987 VNU Science Press.
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