Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
Thin films of asymmetric diblock copolymers have been used as scaffolds to define an ordered array of nanometer-scale reaction vessels in which High density arrays of silicon oxide nanostructures (see Figure) are produced by exposure to silicon tetrachloride. Such site-specific silicon oxide nanostructures could have widespread uses for sensory and optoelectronic applications.
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Frank Stem
C R C Critical Reviews in Solid State Sciences