Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules
A new polymer multilayer fabrication method by the use of thin films of lamellar polystyrene-block-poly(methyl methacrylate was investigated. The thin-film striped patterns of parallel and perpendicular polystyrene-block- poly(methyl methacrylate) (PS-b-PMMA) lamellar to compare the time evolution of ε were prepared. The thin films of cylindrical and lamellar materials were spin casted and annealed for a time range of 5-4000 minutes. The perpendicular orientation of the lamellar domains were surface pretreated with a random copolymer brush prior to diblock copolymer applications. The measurements show that the topological differences between the cylindrical and lamellar morphologies influence coarsening kinetics.
Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules
A. Krol, C.J. Sher, et al.
Surface Science
R.W. Gammon, E. Courtens, et al.
Physical Review B
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010