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Photomask and Next-Generation Lithography Mask Technology 2004
The paper describes and illustrates a procedure for computing the deflection of a foil bearing due to a finite width bump under conditions such that the deflection is too pronounced to be ignored insofar as solution of the Reynolds lubrication equation is concerned. © 1978.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
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