Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The paper describes and illustrates a procedure for computing the deflection of a foil bearing due to a finite width bump under conditions such that the deflection is too pronounced to be ignored insofar as solution of the Reynolds lubrication equation is concerned. © 1978.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Apostol Natsev, Alexander Haubold, et al.
MMSP 2007
Thomas M. Cover
IEEE Trans. Inf. Theory
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IEEE Communications Magazine