John G. Long, Peter C. Searson, et al.
JES
Paper
Lithographic image simulations
Abstract
Lithographic aerial images have been studied by digital image simulation. The aspects considered include the variation of numerical aperture, defocus, aberrations, source size, source shape, and source centration. © 1985.
Related
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Ronald Troutman
Synthetic Metals
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering