Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
Paper
Low stress development of poly(methylmethacrylate) for high aspect ratio structures
Abstract
Magnetic head requirements for high aspect ratio pole tips were met using single-layer PMMA exposed at 100 kV. Using cooled mixtures of IPA and water and ultrasonic agitation, 14:1 aspect ratios in resist were demonstrated.
Related
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
Conference paper
Learning Reduced Order Dynamics via Geometric Representations
Imran Nasim, Melanie Weber
SCML 2024
Kigook Song, Robert D. Miller, et al.
Macromolecules