Photonic Metacrystal: Design and Experimental Results
- S. Hu
- Marwan H. Khater
- et al.
- 2022
- CLEO 2022
Conference paper
Publications
27 results for Ernst Kratschmer
Photonic metacrystal: Design methodology and experimental characterization
- S. Hu
- Marwan H. Khater
- et al.
- 2022
- Optics Express
PaperExperimental realization of deep-subwavelength confinement in dielectric optical resonators
- Shuren Hu
- Marwan Khater
- et al.
- 2018
- Science Advances
PaperSilicon Nanowire Field Effect Transistor Sensors with Minimal Sensor-to-Sensor Variations and Enhanced Sensing Characteristics
- Sufi Zafar
- Christopher P. D’Emic
- et al.
- 2018
- ACS Nano
PaperBowtie photonic crystal with deep subwavelength mode confinement in a dielectric material
- Shuren Hu
- Marwan Khater
- et al.
- 2017
- CLEO 2017
Conference paperFabrication of sub-20 nm nanopore arrays in membranes with embedded metal electrodes at wafer scales
- Jingwei Bai
- Deqiang Wang
- et al.
- 2014
- Nanoscale
PaperContamination mitigation of hydrogen silsesquioxane resist processed with Na+-containing developer for nanoscale CMOS device patterning
- Markus Brink
- Isaac Lauer
- et al.
- 2014
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Paper200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules
- C. Wang
- S.W. Nam
- et al.
- 2013
- IEDM 2013
Conference paperDot-matrix marks for dynamic overlay measurements in electron beam lithography
- Ernst Kratschmer
- James J. Bucchignano
- et al.
- 2013
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperPatterning of CMOS device structures for 40-80nm pitches and beyond
- Sebastian U. Engelmann
- R.M. Martin
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paper