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Advanced Materials
No abstract available.
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering