William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Periodic structures, that is, structures that consist of a basic pattern which is repeated multiple times, are commonplace in the electronics industry. This paper is concerned with the determination of thermal stresses in such structures. Specifically, it is demonstrated that thermal stresses can be computed using a reduced model, if one uses the correct boundary conditions. It is also shown that a reduced model can give very misleading results if incorrect boundary conditions are employed. © 1992 by ASME.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Fan Jing Meng, Ying Huang, et al.
ICEBE 2007
B.K. Boguraev, Mary S. Neff
HICSS 2000
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997