R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
Neutron reflectivity (NR) and dynamic secondary ion mass spectroscopy (DSIMS) were used to study compositional variations as a function of film depth in thin polymeric nanofoam films formed from triblock copolymers containing 15 wt%, 13 kg/mol polypropylene oxide end blocks with a fluorinated polyimide center block. The triblock copolymer films were spun cast and imidized on silicon substrates and showed an excess amount of polyimide present at both the air/film and film/substrate interfaces. Upon foaming the films showed a slight densification, and the formation of a 50- 150 Å thick polyimide skin at the air interface. The final nanofoam materials had a calculated porosity of roughly 20 vol.% in the center portion of the film. (C) 1999 Elsevier Science Ltd.
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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Technical Digest-International Electron Devices Meeting
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta