E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
An unusual frequency-dependence of the resistivity for ∼ 2.5 Å of Pd on Si(111) is determined by electron energy loss spectroscopy and analyzed using the Bruggeman effective medium theory. This analysis together with hydrogen titration studies indicate a microstructure having small ({less-than or approximate} 7 A ̊) metallic clusters embedded in the Si surface. We also show that electron tunnelling via surface states gives an important contribution to the d.c. conductivity of such metallic films. © 1985.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Michiel Sprik
Journal of Physics Condensed Matter
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010